The Laboratory of Microsystems LMIS2 of Prof. Martin Gijs was established in 1997 and has as mission the development of new microfabrication technologies and to exploit these for applications of industrial interest. We are doing multidisciplinary research in the fields of design, simulation, fabrication, integration and application of microsystems.
- Novel microfabrication technologies
We study the resolution limits of powder blasting micro-erosion as a process for three-dimensional microstructuring of glass and ceramic materials. We are developing protein and DNA immobilisation procedures on solid substrates. We have developed a spin-on-polyimide/Cu multilayer technology for the realization of high-resolution and high-quality factor flex-foil circuits. We have established a process for the replication of three-dimensional and thin film glass nanostructures by moulding and thermally curing of in-house prepared spin-on-glass solutions.
- Magnetic applications
We have realised three-dimensional millimetre-size power transformers using a patented ferrite wafer – flex foil batch fabrication and assembly process. We are working on miniaturised systems for the handling and magnetic transport of magnetic micro- and nanoparticles in microfluidic devices.
- Microfluidics and Bio-MEMS
We are active in the realisation and use of glass and polymer microfluidic chips and demonstrated a new pressure pulse sample injection method for electrophoresis and electrochromatography applications. We have developed glass and plastic micropumps using various magnetic actuation and valving principles. We are developing microsystems for automated cell patch-clamp measurements, with which we performed experiments on mamalian cells and Xenopus oocytes. We are developing microfluidic channel- and droplet-based microsystems for the handling of magnetic beads for biomedical and mixing applications. We also have realized DNA-chips, where DNA hybridization reactions are monitored either by fluorescence or impedance measurements.